JEL SWCR3160CS
3-Axis Cylindrical Coordinate Clean Robot
Peculiarity
Product Profile
Model Name ： SWCR3160CS
Environment ： Clean room atmosphere
Arm ： Single arm
Operating Range ： 312mm (3rd joint center)
Vertical Stroke ： 200mm / 300mm
Payload Capacity ： Below 3kg (calculated for the arm 3rd joint)
List of Product Model
Product Model Vertical Stroke
SWCR3160CS-200-PM 200mm
SWCR3160CS-300-PM 300mm
Characteristics
Designed for handling 300mm wafers in a LSI production line under the condition of acid or alkaline mist (IP64). Flip and edge grip functions are available.
Corrosion protection for arm by Teflon coating
V-type seals are used for waterproof of arm joint
Viton seals are used for parts joint
Bellows are used for waterproof of vertical axis
RS232C and parallel photo I/O are standard for control
2-phase stepping motor installed in all axes
High-speed, high-accuracy wafer handlingby S-curved speed control
Wafer holding: end-effector with vacuum suction, passive edge, or edge grip type End-effector
Optimal end-effector is selectable according to the carrying object and line layout